Products

Description The XEN-3880 is a thermal conductivity gauge (TCG) made using silicon technology. The sensor chip consists of a silicon rim of 2.50 x 3.33 mm, 0.3 mm thick, in which a silicon-nitride membrane is created. In the center is a heater, with a sensor element measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane, and this depends on several parameters, such as pressure, gas type, and material depositions on the membrane. This dependence upon physical parameters allows the TCG to measure such quantities as absolute pressure, gas type and gas mixture composition.

Options PT100 / PT1000 With Roof or without Roof

Standard version PT100, Roof, Welded cap with mesh, mounted on a 10 pin TO-5 housing.

Description The XEN-3920 thermal conductivity gauge measures thermal conductivity of the surrounding gas. Operating on the principle that gases differ in their thermal conductivity, it can be used to measure gas concentration in binary mixtures or quasi-binary mixtures where component gases have different thermal conductivity. It can also be used to measure pressure in vacuum systems. The sensor chip consists of a silicon frame with 2 silicon-nitride membrane2. In the center of each membrane is a heater, with a thermopile measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane. A silicon cover (Roof) on top of the membrane and a welded cap with filter (W) suppress flow sensitivity

Options PT100 / PT1000

Standard version PT100, Roof, Welded cap with mesh, mounted on a 10 pin TO-5 housing.