Description The XEN-3880 is a thermal conductivity gauge (TCG) made using silicon technology. The sensor chip consists of a silicon rim of 2.50 x 3.33 mm, 0.3 mm thick, in which a silicon-nitride membrane is created. In the center is a heater, with a sensor element measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane, and this depends on several parameters, such as pressure, gas type, and material depositions on the membrane. This dependence upon physical parameters allows the TCG to measure such quantities as absolute pressure, gas type and gas mixture composition.
Options PT100 / PT1000 With Roof or without Roof
Standard version PT100, Roof, Welded cap with mesh, mounted on a 10 pin TO-5 housing.
Description The XEN-3920 thermal conductivity gauge measures thermal conductivity of the surrounding gas. Operating on the principle that gases differ in their thermal conductivity, it can be used to measure gas concentration in binary mixtures or quasi-binary mixtures where component gases have different thermal conductivity. It can also be used to measure pressure in vacuum systems. The sensor chip consists of a silicon frame with 2 silicon-nitride membrane2. In the center of each membrane is a heater, with a thermopile measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane. A silicon cover (Roof) on top of the membrane and a welded cap with filter (W) suppress flow sensitivity
Options PT100 / PT1000
Standard version PT100, Roof, Welded cap with mesh, mounted on a 10 pin TO-5 housing.
Datasheets
![]() | XEN-3880 Datasheet XEN-3880 XEN-3880-P2-P3-RW.pdf (216.16KB) |
![]() | XEN-3920 Datasheet XEN-3920 XEN-3920-P2-P3-RW.pdf (227.16KB) |
Application Notes
![]() | Thermal Conductivity Application note Thermal Conductivity Thermalconductivity.pdf (159.9KB) |
![]() | Pressure Effect on Thermal Conductivity Sensor XEN-3880 Application note Pressure Effect on Thermal Conductivity Sensor XEN-3880 Pressure Effect on Thermal Conductivity Sensor XEN-3880.pdf (130.18KB) |
![]() | Pressure Effect on Thermal Conductivity Sensor XEN-3880.pdf (130.18KB) |
![]() | Read-out & Biasing of XEN-3880 Application note Read-out & Biasing of XEN-3880 Read-out and biasing of XEN-3880.pdf (221.48KB) |
![]() | Read-out and biasing of XEN-3880.pdf (221.48KB) |
![]() | Temperature Coefficient of XEN-3880 Application note Temperature Coefficient of XEN-3880 Temperature Coefficient of XEN-3880.pdf (263.54KB) |
![]() | Temperature Coefficient of XEN-3880.pdf (263.54KB) |
![]() | Vacuum measurement XEN-3880 Application note Vacuum measurement XEN-3880 Vacuum measurement-XEN-3880.pdf (300.68KB) |
![]() | Vacuum measurement-XEN-3880.pdf (300.68KB) |
Pricelist
![]() | Pricelist Pricelist Thermal Conductivity Gauges P202209 Thermal Conductivity Gauges.pdf (161.14KB) |